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Proceedings Paper

Atomic force microscope for small cantilevers
Author(s): Tilman E. Schaeffer; Mario Viani; Deron A. Walters; Barney Drake; Erik K. Runge; Jason P. Cleveland; Mark A. Wendman; Paul K. Hansma
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Paper Abstract

We have designed and built an atomic force microscope (AFM) with optical beam deflection detection providing a focused spot size of 1.6 micrometers in diameter. This small spot size was implemented with a variable focus adjustment that allows us to re-focus on each cantilever. This design opens up the usage of a new range of small cantilevers with low-noise characteristics. We have microfabricated novel aluminum cantilevers with dimensions as small as 9 micrometers in length and 2.5 micrometers in width and have characterized them with this new AFM. The resonance frequency of the smallest cantilever was 2.5 MHz in air and 0.94 MHz in water. We demonstrated the imaging capabilities of the AFM head by imaging abalone nacre with a 10 micrometers long cantilever using the tapping mode in liquid at a drive frequency of 442 KHz.

Paper Details

Date Published: 15 April 1997
PDF: 5 pages
Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); doi: 10.1117/12.271228
Show Author Affiliations
Tilman E. Schaeffer, Univ. of California/Santa Barbara (United States)
Mario Viani, Univ. of California/Santa Barbara (United States)
Deron A. Walters, Univ. of California/Santa Barbara (United States)
Barney Drake, Univ. of California/Santa Barbara (United States)
Erik K. Runge, Digital Instruments, Inc. (United States)
Jason P. Cleveland, Digital Instruments, Inc. (United States)
Mark A. Wendman, Digital Instruments, Inc. (United States)
Paul K. Hansma, Univ. of California/Santa Barbara (United States)


Published in SPIE Proceedings Vol. 3009:
Micromachining and Imaging
Terry A. Michalske; Mark A. Wendman, Editor(s)

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