Share Email Print
cover

Proceedings Paper

Microfabricated biaxial electrostatic torsional scanning mirror
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We describe the design, fabrication and characterization of a biaxial torsional scanning mirror for use in a microfabricated confocal optical microscope. The mirror, fabricated using wafer bonding and surface micromachining techniques, is a gimbal structure consisting of a silicon plate, measuring 500 micrometers X 500 micrometers X 25 micrometers , which is suspended in a silicon frame by silicon nitride hinges. It is actuated electrostatically, and is capable of raster scanning with a line scan frequency of 2.7 kHz and with a scan range of +/- 1.5 degree(s) about both orthogonal axes. Both resonant and non-resonant scanning are discussed. Sample images acquired with a frame rate of 10 Hz using a microfabricated microscope with the biaxial scanning mirror are presented.

Paper Details

Date Published: 15 April 1997
PDF: 10 pages
Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); doi: 10.1117/12.271223
Show Author Affiliations
David L. Dickensheets, Stanford Univ. (United States)
Gordon S. Kino, Stanford Univ. (United States)


Published in SPIE Proceedings Vol. 3009:
Micromachining and Imaging
Terry A. Michalske; Mark A. Wendman, Editor(s)

© SPIE. Terms of Use
Back to Top