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Proceedings Paper

Application and characterization of combined SNOM/SFM cantilever probes
Author(s): Stephfan Werner; Stefan Muenster; Sven Heisig; Christopher Mihalcea; Wenzel Scholz; Egbert Oesterschulze
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Paper Abstract

A combined SNOM/SFM aperture probe is presented which is based on a conventional scanning force microscopy cantilever. Probe fabrication was performed in a batch process which allows to get reproducible mechanical and optical properties. For SNOM applications a tip is integrated at the very end of the cantilever which consists of a hollow metal pyramid with a miniaturized aperture of about 60 nm. To select the appropriate tip material the transmissivity of different metals were investigated in the visible range. The SNOM/SFM probes were characterized both mechanically and optically, e.g. the transmission of apertures is measured as a function of their size. To determined the lateral resolution in the optical transmission mode measurements on test samples are shown. Additionally, a novel probe design is introduced where the geometry of the single aperture tip is altered to obtain a double aperture tip.

Paper Details

Date Published: 15 April 1997
PDF: 11 pages
Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); doi: 10.1117/12.271221
Show Author Affiliations
Stephfan Werner, Univ. of Kassel (Germany)
Stefan Muenster, Univ. of Kassel (Germany)
Sven Heisig, Univ. of Kassel (Germany)
Christopher Mihalcea, Univ. of Kassel (Germany)
Wenzel Scholz, Univ. of Kassel (Germany)
Egbert Oesterschulze, Univ. of Kassel (Germany)


Published in SPIE Proceedings Vol. 3009:
Micromachining and Imaging
Terry A. Michalske; Mark A. Wendman, Editor(s)

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