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Proceedings Paper

Focusing properties of a micromachined electron lens
Author(s): David A. Crewe; Marvin M. Ruffin; Alan D. Feinerman
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Paper Abstract

The probe forming capability of a microfabricated silicon electrostatic electron lens is under investigation. The lens measures 7 mm by 9 mm by 1.64 mm and consists of three silicon electrodes separated by Pyrex optical fibers. A test structure was designed to house the micromachined lens and a commercially available electron emitter as well as deflectors and an electron detector. Images of a 1000 mesh gold TEM wire grid at a working distance of 4 mm are being obtained at magnifications greater than 10,000 X. Data from the images will be analyzed to estimate the quality of the electron beam.

Paper Details

Date Published: 15 April 1997
PDF: 7 pages
Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); doi: 10.1117/12.271218
Show Author Affiliations
David A. Crewe, Univ. of Illinois/Chicago (United States)
Marvin M. Ruffin, Univ. of Illinois/Chicago (United States)
Alan D. Feinerman, Univ. of Illinois/Chicago (United States)

Published in SPIE Proceedings Vol. 3009:
Micromachining and Imaging
Terry A. Michalske; Mark A. Wendman, Editor(s)

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