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Proceedings Paper

Microelectromechanical force probe array
Author(s): Scott A. Miller; Kimberly L. Turner; Noel C. MacDonald
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Paper Abstract

The largest array (12 X 12) of microelectromechanical probe tips with integrated actuators and capacitive sensors for scanning probe microscopy has been designed, fabricated, and characterized. Each array element consists of a single crystal silicon tip on a torsional cantilever with out-of- plane interdigitated electrode capacitors. In addition, the size of each array element is about 150 micrometers by 150 micrometers with a tip-to-tip spacing in the array of 200 micrometers . Give these dimensions, the packing density of the devices is about 2500 units/cm2. The out-of-plane torsional design allows for significant improvement in performance (larger tip displacement and increased sense capacitance) and a higher density of devices per unit area as the minimum feature size decreases. Applications such as information storage, molecular manipulation, and nanolithography require high density, parallel arrays for reasonable throughput.

Paper Details

Date Published: 15 April 1997
PDF: 10 pages
Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); doi: 10.1117/12.271215
Show Author Affiliations
Scott A. Miller, Cornell Univ. (United States)
Kimberly L. Turner, Cornell Univ. (United States)
Noel C. MacDonald, Cornell Univ. (United States)

Published in SPIE Proceedings Vol. 3009:
Micromachining and Imaging
Terry A. Michalske; Mark A. Wendman, Editor(s)

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