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Proceedings Paper

Room-temperature operation of a YBaCuO microbolometer
Author(s): Zeynep Celik-Butler; Donald P. Butler; Agha Jahanzeb; John E. Gray; C.M. Travers
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Paper Abstract

Linear arrays of 40 X 40 micrometers 2 to 60 X 60 micrometers 2 microbolometers utilizing a semiconducting YBaCuO thin film as the IR sensitive material were fabricated and tested. This material displays a high temperature coefficient of resistance at room temperature, which makes it very attractive as an uncooled IR detector. The compatibility of semiconducting YBaCuO with Si micromachining techniques and CMOS technology and its ease of fabrication into thin films is attractive to the fabrication of inexpensive, high performance infrared detectors and imaging arrays. The room temperature responsivity, Rv, of the detectors was measured using 100 Hz chopped broad band infrared radiation to be as high as 104 V/W at 0.8 (mu) A current bias, providing a detectivity of 107 cm Hz1/2/W. The thermal conductance, G, of the isolation structure was measured to be a relatively high 10-5 W/K which limited the responsivity of the detector. Since Rv varies as 1/G, the responsivity and hence detectivity may be increased by up to two orders of magnitude by improving the thermal isolation. Zero bias responsivity was also observed on the structures, which was interpreted as pyroelectric IR detection. This was confirmed with independent pyroelectric current measurements.

Paper Details

Date Published: 15 April 1997
PDF: 9 pages
Proc. SPIE 2999, Photodetectors: Materials and Devices II, (15 April 1997); doi: 10.1117/12.271205
Show Author Affiliations
Zeynep Celik-Butler, Southern Methodist Univ. (United States)
Donald P. Butler, Southern Methodist Univ. (United States)
Agha Jahanzeb, Southern Methodist Univ. (United States)
John E. Gray, Southern Methodist Univ. (United States)
C.M. Travers, Southern Methodist Univ. (United States)

Published in SPIE Proceedings Vol. 2999:
Photodetectors: Materials and Devices II
Gail J. Brown; Manijeh Razeghi, Editor(s)

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