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Proceedings Paper

Wide-spectral response photodetectors based on microcrystalline hydrogenated silicon thin films
Author(s): Manuela Vieira; Alessandro Fantoni; Svetoslav Koynov; Reinhard Schwarz
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Paper Abstract

Microcrystalline hydrogenated silicon based p-i-n photodiodes with an increased infrared sensitivity have been deposited by a new cyclic CVD method. The microcrystalline deice, when compared to the amorphous counterpart, presents an increased collection efficiency, dependent on bias voltage, in the red and near-infrared spectral region. The shape of the spectral response also depends on the details of the quality of the individual layers, like conductivity and thickness of the p-type contact layer. AS model for the electronic transport of (mu) c-Si:H p-i-n photodetectors is presented and supported by numerical simulation.

Paper Details

Date Published: 15 April 1997
PDF: 10 pages
Proc. SPIE 2999, Photodetectors: Materials and Devices II, (15 April 1997); doi: 10.1117/12.271189
Show Author Affiliations
Manuela Vieira, Univ. Nova de Lisboa (Portugal)
Alessandro Fantoni, Univ. Nova de Lisboa (Portugal)
Svetoslav Koynov, Bulgarian Academy of Sciences (Bulgaria)
Reinhard Schwarz, IST (Portugal)

Published in SPIE Proceedings Vol. 2999:
Photodetectors: Materials and Devices II
Gail J. Brown; Manijeh Razeghi, Editor(s)

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