Share Email Print
cover

Proceedings Paper

Unidirectional surface-normal waveguide grating couplers for wafer-scale MCM interconnect
Author(s): Feiming Li; Linghui Wu; Ting Li; Michael Dubinovsky; Suning Tang; Ray T. Chen
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We report the fabrication of tilted gratings on polyimide waveguides. The reported gratings provide an effective unidirectional surface-normal optical couple-in and couple- out for polymer-based optoelectronic interconnects. Such a planarized grating is particularly suitable for wafer-scale MCM optoelectronic interconnects due to its unique non- blocking fanout feature. both surface-normal input and output grating couplers have been demonstrated for the first time on polyimide waveguides on silicon substrate.

Paper Details

Date Published: 4 April 1997
PDF: 7 pages
Proc. SPIE 3005, Optoelectronic Interconnects and Packaging IV, (4 April 1997); doi: 10.1117/12.271081
Show Author Affiliations
Feiming Li, Univ. of Texas/Austin (United States)
Linghui Wu, Univ. of Texas/Austin (United States)
Ting Li, Univ. of Texas/Austin (United States)
Michael Dubinovsky, Univ. of Texas/Austin (United States)
Suning Tang, Univ. of Texas/Austin (United States)
Ray T. Chen, Univ. of Texas/Austin (United States)


Published in SPIE Proceedings Vol. 3005:
Optoelectronic Interconnects and Packaging IV
Ray T. Chen; Peter S. Guilfoyle, Editor(s)

© SPIE. Terms of Use
Back to Top