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Proceedings Paper

Fabrication issues of oxide-confined VCSELs
Author(s): Kent M. Geib; Kent D. Choquette; Hong Q. Hou; B. Eugene Hammons
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Paper Abstract

To insert high performance oxide-confined vertical-cavity surface-emitting lasers (VCSELs) into the manufacturing arena, we have examined the critical parameters that must be controlled to establish a repeatable and uniform wet thermal oxidation process for AlGaAs. These parameters include the AlAs mole fraction, the sample temperature, the carrier gas flow and the bubbler water temperature. Knowledge of these critical parameters has enabled the compilation of oxidation rate data for AlGaAs which exhibits an Arrhenius rate dependence. The compositionally dependent activation energies for AlxGa1-xAs layers of x equals 1.00, 0.98 and 0.92 are found to be 1.24, 1.75, and 1.88 eV, respectively.

Paper Details

Date Published: 4 April 1997
PDF: 6 pages
Proc. SPIE 3003, Vertical-Cavity Surface-Emitting Lasers, (4 April 1997); doi: 10.1117/12.271054
Show Author Affiliations
Kent M. Geib, Sandia National Labs. (United States)
Kent D. Choquette, Sandia National Labs. (United States)
Hong Q. Hou, Sandia National Labs. (United States)
B. Eugene Hammons, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 3003:
Vertical-Cavity Surface-Emitting Lasers
Kent D. Choquette; Dennis G. Deppe, Editor(s)

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