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Proceedings Paper

Monolithic OEICs using GaAs VLSI technology
Author(s): Joseph F. Ahadian; Steven G. Patterson; Praveen T. Vaidyanathan; Yakov Royter; Daniel E. Mull; Gale S. Petrich; William T. Goodhue; Sheila Prasad; Leslie A. Kolodziejski; Clifton G. Fonstad
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Paper Abstract

Optical interconnects for use in high speed computing and communication systems require dense optoelectronic integrated circuits (OEICs). Monolithic integration of III-V optoelectronics with VLSI optoelectronics with VLSI- complexity electronics will yield OEICs of the high density, performance, manufacturability, and reliability. The epitaxy-on-electronics (EoE) technique monolithically integrates optoelectronic devices with commercially- fabricated, fully-metallized GaAs VLSI integrated circuits. This manuscript reviews the EoE process and details the fabrication of integrated LEDs. This LED-OEIC process is being used by optical interconnect systems researchers on a prototype basis through the OPTOCHIP project: the current status of this effort is reviewed.

Paper Details

Date Published: 4 April 1997
PDF: 6 pages
Proc. SPIE 3002, Light-Emitting Diodes: Research, Manufacturing, and Applications, (4 April 1997); doi: 10.1117/12.271045
Show Author Affiliations
Joseph F. Ahadian, Massachusetts Institute of Technology (United States)
Steven G. Patterson, Massachusetts Institute of Technology (United States)
Praveen T. Vaidyanathan, Northeastern Univ. (United States)
Yakov Royter, Massachusetts Institute of Technology (Japan)
Daniel E. Mull, Lincoln Lab./MIT (United States)
Gale S. Petrich, Massachusetts Institute of Technology (United States)
William T. Goodhue, Univ. of Massachusetts/Lowell (United States)
Sheila Prasad, Massachusetts Institute of Technology (United States)
Leslie A. Kolodziejski, Massachusetts Institute of Technology (United States)
Clifton G. Fonstad, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 3002:
Light-Emitting Diodes: Research, Manufacturing, and Applications
E. Fred Schubert, Editor(s)

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