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Proceedings Paper

Real-time machine vision for semiconductor manufacturing
Author(s): Edward T. Polkowski
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Paper Abstract

Real-time vision has many applications in the area of semiconductor manufacturing. Typical processes use machine vision for alignment, inspection, measurement, process control, and quality control. This paper describes one application where machine vision is used in conjunction with a diffraction based optical technique to measure linewidth for use in critical dimension control.

Paper Details

Date Published: 3 April 1997
PDF: 5 pages
Proc. SPIE 3028, Real-Time Imaging II, (3 April 1997); doi: 10.1117/12.270350
Show Author Affiliations
Edward T. Polkowski, Research Devices, Inc. (United States)

Published in SPIE Proceedings Vol. 3028:
Real-Time Imaging II
Divyendu Sinha, Editor(s)

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