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Proceedings Paper

Precision materials processing in microelectronics with a 10 W copper bromide laser
Author(s): Jerzy Mizeraczyk; A. Otta; Mostefa Mohamed-Seghir; J. Wasilewski; A. Jurewicz; W. Janke; Chris E. Little; Nikola V. Sabotinov; Ewan S. Livingstone; I. Z. Kostadinov
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Paper Abstract

In this contribution experimental results in high-precision processing of various reflecting metals employed in microelectronics carried out with a 10 W copper bromide laser are presented.

Paper Details

Date Published: 4 April 1997
PDF: 4 pages
Proc. SPIE 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (4 April 1997); doi: 10.1117/12.270237
Show Author Affiliations
Jerzy Mizeraczyk, Institute of Fluid-Flow Machinery (Poland)
A. Otta, Institute of Fluid Flow Machinery (Poland)
Mostefa Mohamed-Seghir, Institute of Fluid Flow Machinery (Poland)
J. Wasilewski, Institute of Fluid Flow Machinery (Poland)
A. Jurewicz, Technical Univ. of Gdansk (Poland)
W. Janke, Technical Univ. of Gdansk (Poland)
Chris E. Little, Univ. of St. Andrews (United Kingdom)
Nikola V. Sabotinov, Institute of Solid State Physics (Bulgaria)
Ewan S. Livingstone, EEV Ltd. (United Kingdom)
I. Z. Kostadinov, Univ. of Sofia (Bulgaria)


Published in SPIE Proceedings Vol. 3092:
XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference
Denis R. Hall; Howard J. Baker, Editor(s)

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