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Proceedings Paper

Picosecond imaging of laser-induced ablation processes and production of microstructures by picosecond laser pulses
Author(s): Juergen Jandeleit; P. Russbueldt; G. Urbasch; D. Hoffmann; Ernst-Wolfgang Kreutz; Hans-Georg Treusch
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Paper Abstract

Picosecond laser pulses were used for microstructuring metals, ceramics and diamond. Using 40 ps laser pulses line patterns with a minimum line width in the range of 7 micrometer were formed in diamond without destroying the crystallinity. In Si3N4-ceramics holes were drilled with diameters smaller than 6 micrometer. Ultrathin copper and gold films of 1 micrometer thickness were removed from fused silica and silicon (100) without influencing the substrates. The ablation process was investigated by high-speed photography and pump-&- probe-measurements with a time resolution of 40 picoseconds. The measurements allow a detailed characterization of the melting, vaporization and solidification processes. Shock waves in the ambient atmosphere were detected and the energy in the shock wave was determined.

Paper Details

Date Published: 4 April 1997
PDF: 4 pages
Proc. SPIE 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (4 April 1997); doi: 10.1117/12.270113
Show Author Affiliations
Juergen Jandeleit, RWTH Aachen (Germany)
P. Russbueldt, RWTH Aachen (Germany)
G. Urbasch, RWTH Aachen (Germany)
D. Hoffmann, RWTH Aachen (Germany)
Ernst-Wolfgang Kreutz, RWTH Aachen (Germany)
Hans-Georg Treusch, Fraunhofer Institut fuer Lasertechnik (Germany)

Published in SPIE Proceedings Vol. 3092:
XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference
Denis R. Hall; Howard J. Baker, Editor(s)

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