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Proceedings Paper

Deposition of diamond-like carbon films using XeCl-excimer laser
Author(s): Mao-Kuo Wei; Robert Queitsch; Adolf Lang; Karsten Schutte; Hans Wilhelm Bergmann
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Paper Abstract

Diamond-like carbon (DLC) films were deposited using the laser-assisted physical vapor deposition (LPVD) method. This work is dedicated to an XeCl-excimer laser PVD procedure. The influences of the power density, working distance, and substrate temperature on the DLC-deposition are discussed. The propagation velocity of the laser ignited plasma was determined using short-time photography and time-of-flight (TOF) method.

Paper Details

Date Published: 4 April 1997
PDF: 4 pages
Proc. SPIE 3092, XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (4 April 1997); doi: 10.1117/12.270111
Show Author Affiliations
Mao-Kuo Wei, ATZ-EVUS (Germany)
Robert Queitsch, ATZ-EVUS (Germany)
Adolf Lang, Univ. Erlangen-Nuernberg (Germany)
Karsten Schutte, Univ. Erlangen-Nuernberg (Germany)
Hans Wilhelm Bergmann, Univ. Erlangen-Nuernberg (Germany)


Published in SPIE Proceedings Vol. 3092:
XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference
Denis R. Hall; Howard J. Baker, Editor(s)

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