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Proceedings Paper

Performance characteristics of a high-energy, high-pulse repetition frequency krypton fluoride laser
Author(s): Tom A. Watson; Richard Ujazdowski; Palash P. Das
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Paper Abstract

As applications have evolved out of the research areas, laser beam properties and component lifetimes have become critical to achieving low operating cost in a manufacturing environment. We will discuss the development of a 110 watt KrF laser using an all solid-state pulsed power system. Solid state pulsed power enables a significant reduction in system operating costs by greatly extending the exchange interval of the pulsed power and discharge chamber modules. Beam properties of the laser using both stable and unstable resonator configurations will be discussed.

Paper Details

Date Published: 31 March 1997
PDF: 9 pages
Proc. SPIE 2992, Excimer Lasers, Optics, and Applications, (31 March 1997); doi: 10.1117/12.270095
Show Author Affiliations
Tom A. Watson, Cymer Inc. (United States)
Richard Ujazdowski, Cymer Inc. (United States)
Palash P. Das, Cymer Inc. (United States)


Published in SPIE Proceedings Vol. 2992:
Excimer Lasers, Optics, and Applications
Harry Shields; Peter E. Dyer, Editor(s)

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