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Proceedings Paper

Excimer lasers for material ablation cross the 1.5 kHz mark
Author(s): Rainer Paetzel; Uwe Stamm; Igor Bragin; Frank Voss; Bernard K. Nikolaus; Heinrich Endert; Dirk Basting
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Paper Abstract

Industrial applications of excimer laser include fabrication of multi-chip modules, ink jet nozzles and TFT annealing of flat panel displays. For more than a decade these applications and the deep-UV-lithography pushed the excimer laser technology to improved performance and lower cost. As a result, highly reliable laser systems have been developed, which utilize state of the art technologies like metal ceramic laser tubes, solid state switching circuits and solid state halogen generation.High repetition rate lasers are suitable for micromachining applications especially in the direct structuring mode. Depending on the processing parameter the throughput and operating cost of such a high repetition rate system will be advantageous compared to standard laser systems. In the absence of other process inherent limitations, the processing time both for 2D and 3D laser ablation are proportional to the lasers pulse repetition rate. While most industrial lasers are limited to 300 Hz repetition rate, the developed laser operates up to 1.5 kHz.

Paper Details

Date Published: 31 March 1997
PDF: 5 pages
Proc. SPIE 2992, Excimer Lasers, Optics, and Applications, (31 March 1997); doi: 10.1117/12.270082
Show Author Affiliations
Rainer Paetzel, Lambda Physik GmbH (Germany)
Uwe Stamm, Lambda Physik GmbH (Germany)
Igor Bragin, Lambda Physik GmbH (Germany)
Frank Voss, Lambda Physik GmbH (Germany)
Bernard K. Nikolaus, Lambda Physik GmbH (Germany)
Heinrich Endert, Lambda Physik GmbH (Germany)
Dirk Basting, Lambda Physik GmbH (Germany)

Published in SPIE Proceedings Vol. 2992:
Excimer Lasers, Optics, and Applications
Harry Shields; Peter E. Dyer, Editor(s)

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