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Proceedings Paper

5-nm resolution in a vibrating environment with a 1-mm dynamic range
Author(s): Yifang Wu; C. K. Man; Bing Yin; Michael K. Giles; Thomas M. Shay
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Paper Abstract

We report the first demonstration of high resolution mm dynamic range measurements using sinusoidal phase modulation interferometry. Our novel method has increased the range by over 3 orders of magnitude, while maintaining ultra-high accuracy. Simple commercial laser diodes were used and a new algorithm allowed for the first ultra-high accuracy and high dynamic range in real time for a slightly vibrating environment.

Paper Details

Date Published: 27 March 1997
PDF: 12 pages
Proc. SPIE 2993, Lasers as Tools for Manufacturing II, (27 March 1997); doi: 10.1117/12.270027
Show Author Affiliations
Yifang Wu, Peking Univ. (China)
C. K. Man, New Mexico State Univ. (United States)
Bing Yin, New Mexico State Univ. (United States)
Michael K. Giles, New Mexico State Univ. (United States)
Thomas M. Shay, New Mexico State Univ. (United States)

Published in SPIE Proceedings Vol. 2993:
Lasers as Tools for Manufacturing II
Leonard R. Migliore; Ronald D. Schaeffer, Editor(s)

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