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Proceedings Paper

Destruction of silicon and copper surface under pulsed and pulse periodic action of YAG:Nd laser
Author(s): Alexander F. Banishev; Elena A. Baliikina
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Paper Abstract

The paper presents the results of the study of silicon and copper surface destruction under pulsed and pulse-periodic action of YAG:Nd laser radiation. The anomalies have been discovered in the probe beam of He-Ne laser scattered from the silicon surface under its irradiation with a series of YAG:Nd laser pulses at I less than Imelt. (where Imelt. is the surface melting threshold). These anomalies are supposedly related to formation of surface layer saturated with defects.

Paper Details

Date Published: 27 March 1997
PDF: 4 pages
Proc. SPIE 2993, Lasers as Tools for Manufacturing II, (27 March 1997); doi: 10.1117/12.270025
Show Author Affiliations
Alexander F. Banishev, Scientific Research Ctr. for Technological Lasers (Russia)
Elena A. Baliikina, Scientific Research Ctr. for Technological Lasers (Russia)


Published in SPIE Proceedings Vol. 2993:
Lasers as Tools for Manufacturing II
Leonard R. Migliore; Ronald D. Schaeffer, Editor(s)

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