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Proceedings Paper

Polyimide processing with a cw pumped q-switched frequency-doubled Nd:YLF laser
Author(s): Jeffrey S. Bernstein; Jay A. Guerette; Ronald D. Schaeffer
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Paper Abstract

A frequency doubled Nd:YLF laser is investigated as a potential source for photoablation of polyimide films. The hole diameter as a function of incident laser power is studied in a 25 micron thick free standing polyimide film. The photoetched vias are inspected by optical microscopy and show a relatively clean surface surrounding the entrance diameter. The microscopy studies also reveal that the vias exhibit a shape which has three characteristic diameters. The entrance and exit diameters are of similar dimension and define a melt zone region. A uniform circular waist diameter, which is smaller than entrance and exit diameters, can only be obtained with 5 to 10 laser pulses and pulse energies above 4 mJ.

Paper Details

Date Published: 27 March 1997
PDF: 12 pages
Proc. SPIE 2993, Lasers as Tools for Manufacturing II, (27 March 1997); doi: 10.1117/12.270021
Show Author Affiliations
Jeffrey S. Bernstein, Resonetics, Inc. (United States)
Jay A. Guerette, Resonetics, Inc. (United States)
Ronald D. Schaeffer, Resonetics, Inc. (United States)

Published in SPIE Proceedings Vol. 2993:
Lasers as Tools for Manufacturing II
Leonard R. Migliore; Ronald D. Schaeffer, Editor(s)

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