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Proceedings Paper

Acoustic wave device for the translation of microparticles
Author(s): Philippe Luginbuhl; Nico F. de Rooij; Scott D. Collins; Georges-Andre Racine; Nava J. Setter; K. G. Brooks
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Paper Abstract

The fabrication and characterization of a microfabricated, fexural plate, acoustic wave delay line is presented for use in the physical translation of fluids and/or biological cells. The device consists of dual interdigitated transducers patterned on a thin film composite membrane of silicon nitride, platinum, and sol gel derived piezoelectric ceramic (PZT). The acoustic properties of the device are presented along with preliminary applications to mechanical transport and liquid delivery systems. Improved acoustic signals and improved mass transport are achieved with PZT over present fexural plate wave devices employing ZnO as the piezoelectric material.

Paper Details

Date Published: 31 March 1997
PDF: 6 pages
Proc. SPIE 2978, Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications, (31 March 1997); doi: 10.1117/12.269963
Show Author Affiliations
Philippe Luginbuhl, Univ. de Neuchatel (Switzerland)
Nico F. de Rooij, Univ. de Neuchatel (Switzerland)
Scott D. Collins, Univ. de Neuchatel (Switzerland)
Georges-Andre Racine, Univ. de Neuchatel (Switzerland)
Nava J. Setter, Ecole Polytechnique Federale de Lausanne (Switzerland)
K. G. Brooks, Ecole Polytechnique Federale de Lausanne (Switzerland)


Published in SPIE Proceedings Vol. 2978:
Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications
Paul Lee Gourley, Editor(s)

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