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Proceedings Paper

Silicon-micromachined direct-pore filters for ultrafiltration
Author(s): Wen Hwa Chu; Tony Huen; Jay K. Tu; Mauro Ferrari
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Paper Abstract

A new silicon filter with straight filtration channels has been fabricated and characterized. The semi-permeable membrane of the filter is made of a sandwiched p+ polysilicon/oxide/p+ silicon structure. The sacrificial oxide between the two silicon layers determines the pore size of the filter. This filter can be mass produced and has very precise control over filtration channels (variation less than 25%). Two log reduction of 100 nm fluorescent particles has been achieved in our 50 nm filters. The tested filtration fluxes for filtered DI water, 0.1 M PBS and ethanol solution (75% wt) were 0.54 - 1.5, 0.10, 0.54 - 1.2 ml/cm2hr, respectively.

Paper Details

Date Published: 31 March 1997
PDF: 12 pages
Proc. SPIE 2978, Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications, (31 March 1997); doi: 10.1117/12.269961
Show Author Affiliations
Wen Hwa Chu, Univ. of California/Berkeley (United States)
Tony Huen, Univ. of California/Berkeley (United States)
Jay K. Tu, Univ. of California/Berkeley (United States)
Mauro Ferrari, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 2978:
Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications
Paul Lee Gourley, Editor(s)

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