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Proceedings Paper

High-sensitivity moire grating fabrication
Author(s): Ling Shi; Fulong Dai; XinGeng Zhou; Werner Daum
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Paper Abstract

Gratings with high sensitivity and high frequency are in big demand in that they are used both as the specimen deformation sensors in the superlattice method and moire interferometry, and as the calibration elements in the field of optoelectronics and matter-wave diffractions. In this paper, photoresist moire gratings with the frequency of up to 6000 lines/mm are fabricated using the coherent light source of argon laser with the wavelength of 457.9 nm. Two techniques are presented. They are: grating fabrication in the refractive medium, and grating frequency multiplication technique. Detailed technologies are given.

Paper Details

Date Published: 20 March 1997
PDF: 5 pages
Proc. SPIE 2921, International Conference on Experimental Mechanics: Advances and Applications, (20 March 1997); doi: 10.1117/12.269870
Show Author Affiliations
Ling Shi, Tsinghua Univ. (China)
Fulong Dai, Tsinghua Univ. (China)
XinGeng Zhou, Tsinghua Univ. (China)
Werner Daum, Bundesanstalt fuer Materialforschung und -pruefung (Germany)


Published in SPIE Proceedings Vol. 2921:
International Conference on Experimental Mechanics: Advances and Applications
Fook Siong Chau; C. T. Lim, Editor(s)

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