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Proceedings Paper

Development and calibration of a submillimeter three-component force sensor
Author(s): W. L. Jin; C. D. Mote Jr.
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Paper Abstract

A sub-millimeter three-component force sensor is developed using silicon microfabrication technology. A polysilicon cross-beam, 300 micrometer by 300 micrometer, with twelve piezoresistive strain gauges integrated on it, is the elastic element of the sensor. The strains detected by the strain gauges are measures of the three orthogonal components of the force applied at the center of the cross-beam. For calibration purposes, electromagnetic forces are generated on an aluminum cross-beam that is suspended over the sensor structure. A 10 (mu) N resolution is obtained for each of the three force components.

Paper Details

Date Published: 20 March 1997
PDF: 6 pages
Proc. SPIE 2921, International Conference on Experimental Mechanics: Advances and Applications, (20 March 1997); doi: 10.1117/12.269843
Show Author Affiliations
W. L. Jin, Univ. of California/Berkeley and Nanjing Univ. of Aeronautics and Astronautics (China)
C. D. Mote Jr., Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 2921:
International Conference on Experimental Mechanics: Advances and Applications
Fook Siong Chau; C. T. Lim, Editor(s)

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