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Proceedings Paper

Design of resonant device using microelectromechanical comb structure
Author(s): Ai Qun Liu; Y. S. Chua
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Paper Abstract

The comb structure is a popular microstructure used in microelectromechanical devices. As a result, it is essential to understand the physics of the comb structure by understanding the levitating force associated with the comb structure. The design of the comb structure can be optimized by minimizing resonator friction and maximizing harmonic work per cycle. The comb structure is fabricated using the high aspect ratio process so as to produce stiffer comb fingers as well as to increase the capacitance between the comb fingers.

Paper Details

Date Published: 20 March 1997
PDF: 6 pages
Proc. SPIE 2921, International Conference on Experimental Mechanics: Advances and Applications, (20 March 1997); doi: 10.1117/12.269797
Show Author Affiliations
Ai Qun Liu, Defense Science Organization (Singapore)
Y. S. Chua, Defense Science Organization (Singapore)

Published in SPIE Proceedings Vol. 2921:
International Conference on Experimental Mechanics: Advances and Applications
Fook Siong Chau; C. T. Lim, Editor(s)

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