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Proceedings Paper

Laser microprojection for micromechanical device fabrication
Author(s): Phil T. Rumsby; Erol C. Harvey; Dafydd T. Thomas
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Paper Abstract

Using advanced laser mask projection methods it is possible to manufacture miniature complex 3D structures in polymers and ceramics for sensor and micromechanical device prototyping or mass manufacture. Subtle movements of workpiece and mask (separately or together) during processing allow complex devices to be realized. Multilevel sensor structures can be constructed using lamination techniques. The full capabilities of laser micromachining techniques are explained in detail and an examples of novel 3D structures made by laser machining are shown.

Paper Details

Date Published: 20 March 1997
PDF: 9 pages
Proc. SPIE 2921, International Conference on Experimental Mechanics: Advances and Applications, (20 March 1997); doi: 10.1117/12.269796
Show Author Affiliations
Phil T. Rumsby, Exitech Ltd. (United Kingdom)
Erol C. Harvey, Exitech Ltd. (United Kingdom)
Dafydd T. Thomas, Exitech Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 2921:
International Conference on Experimental Mechanics: Advances and Applications
Fook Siong Chau; C. T. Lim, Editor(s)

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