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Proceedings Paper

Thin film ozone sensor
Author(s): Tadeusz Pisarkiewicz; Tadeusz Habdank-Wojewodzki; A. Jablonska
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Paper Abstract

Semiconductor ozone sensors, not expensive in technology and maintenance, are required due to both the increasing industrial ozone applications and in view of the need of O3 monitoring in some work places. In this work the design and technology of a thin film semiconductor ozone sensor are described. The sensing layers are In2O3 thin films doped with iron or cerium. The sensitivity as a function of working temperature and film thickness at a given ozone concentration is described. The dynamic response and recovery times of the sensor under the influence of ozone atmosphere are also discussed.

Paper Details

Date Published: 13 February 1997
PDF: 5 pages
Proc. SPIE 3054, Optoelectronic and Electronic Sensors II, (13 February 1997); doi: 10.1117/12.266706
Show Author Affiliations
Tadeusz Pisarkiewicz, Univ. of Mining and Metallurgy (Poland)
Tadeusz Habdank-Wojewodzki, Univ. of Mining and Metallurgy (Poland)
A. Jablonska, Univ. of Mining and Metallurgy (Poland)


Published in SPIE Proceedings Vol. 3054:
Optoelectronic and Electronic Sensors II
Zdzislaw Jankiewicz; Henryk Madura, Editor(s)

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