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Proceedings Paper

Preparation and application in gas detection of rutile oxide semiconductors
Author(s): Katarzyna Zakrzewska; Marta Radecka; Pawel Sobas
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Paper Abstract

TiO2-SnO2 polycrystalline ceramics were prepared by precipitation from SnCl4 and impregnation of TiO2 powder. Thin films were produced by rf reactive sputtering from Ti-Sn metallic target in the Ar+15%O2 reactive gas mixture. The influence of the system composition on gas sensing performance was investigated. The electrical resistance was measured as a function of hydrogen and methane activity in air at different temperatures between 600 K and 1200 K.

Paper Details

Date Published: 13 February 1997
PDF: 7 pages
Proc. SPIE 3054, Optoelectronic and Electronic Sensors II, (13 February 1997); doi: 10.1117/12.266705
Show Author Affiliations
Katarzyna Zakrzewska, Univ. of Mining and Metallurgy (Poland)
Marta Radecka, Univ. of Mining and Metallurgy (Poland)
Pawel Sobas, Univ. of Mining and Metallurgy (Poland)

Published in SPIE Proceedings Vol. 3054:
Optoelectronic and Electronic Sensors II
Zdzislaw Jankiewicz; Henryk Madura, Editor(s)

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