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Proceedings Paper

SAW NO2 sensors employing copper phthalocyanine as the chemical interface
Author(s): Judyta Hechner; Tadeusz Wrobel
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Paper Abstract

This paper presents some problems concerned with SAW NO2 sensors employing copper phthalocyanine (PcCu) as the chemical interface. The influence of piezoelectric substrate materials, crystalline structure and geometry of the PcCu coatings on the sensor sensitivity, and on temperature stability of generated frequency is discussed. The experiments were carried out for SAW delay lines on STX quartz and 128 degree(s)YX lithium niobate. Our measurements concerned PcCu coating of (alpha) and (Beta) structure. We varied the coating layer thickness from 0.1 micrometers to 1.5 micrometers and its density from 0.17 g/cm3 to 1.6 g/cm3. It was found that for the investigated range of parameters the (Beta) -PcCu layer provides several times bettor sensor sensitivity and temperature stability of SAW delay line generation frequency than (alpha) -PcCu layer of the same mass. This is valid for both used substrates.

Paper Details

Date Published: 13 February 1997
PDF: 8 pages
Proc. SPIE 3054, Optoelectronic and Electronic Sensors II, (13 February 1997); doi: 10.1117/12.266702
Show Author Affiliations
Judyta Hechner, Institute of Electronic Materials Technology (Poland)
Tadeusz Wrobel, Institute of Electronic Materials Technology (Poland)

Published in SPIE Proceedings Vol. 3054:
Optoelectronic and Electronic Sensors II
Zdzislaw Jankiewicz; Henryk Madura, Editor(s)

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