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Proceedings Paper

Silicon thermo-optic micromodulators for low-cost low-performance fiber-in-the-loop applications
Author(s): Ivo Rendina; Giuseppe Cocorullo; Francesco G. Della Corte; Pasqualina M. Sarro
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Paper Abstract

All silicon Fabry-Perot modulators, operating at the wavelengths of 1.3 and 1.55 micrometers , have been fabricated by VLSI technology. The planar channel cavities, with lengths ranging between 50 and 100 micrometers , have been obtained by plasma etching and not by cleavage of the chips. Therefore, the devices are really integrable with microelectronic circuits or with other photonics components. the modulators, based on the thermo-optic effect, are electrically driven and operate at repetition frequencies up to about 2 MHz. This is by far the best result obtained in thermo-optic effect based modulators. Optimixed version of the devices could find application in low-cost optoelectronic systems at the subscriber units in fiber-to-the-home networks.

Paper Details

Date Published: 23 January 1997
PDF: 6 pages
Proc. SPIE 2997, Integrated Optics Devices: Potential for Commercialization, (23 January 1997); doi: 10.1117/12.264161
Show Author Affiliations
Ivo Rendina, IRECE (Italy)
Giuseppe Cocorullo, IRECE (Italy)
Francesco G. Della Corte, IRECE (Italy)
Pasqualina M. Sarro, Delft Univ. of Technology (Netherlands)

Published in SPIE Proceedings Vol. 2997:
Integrated Optics Devices: Potential for Commercialization
S. Iraj Najafi; Mario Nicola Armenise, Editor(s)

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