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Proceedings Paper

Organoaluminophosphate sol-gel silica glass thin films for integrated optics
Author(s): Tahar Touam; Galina Milova; Z. Saddiki; M. Amir Fardad; Mark P. Andrews; Salim K. Juma; Jacek Chrostowski; S. Iraj Najafi
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Paper Abstract

We report on the fabrication and characterization of waveguide thin films on silicon by ultraviolet light imprinting in a new photosensitive, organically modified aluminophosphate sol-gel silica glass prepared by a one-step dip-coating process. Appropriate combinations of ultraviolet light exposure time, sol-gel film thickness and postbake parameters produce waveguides suitable for optical telecommunication applications.

Paper Details

Date Published: 23 January 1997
PDF: 6 pages
Proc. SPIE 2997, Integrated Optics Devices: Potential for Commercialization, (23 January 1997); doi: 10.1117/12.264135
Show Author Affiliations
Tahar Touam, Ecole Polytechnique de Montreal (Canada)
Galina Milova, McGill Univ. (Canada)
Z. Saddiki, Ecole Polytechnique de Montreal (Canada)
M. Amir Fardad, McGill Univ. (Canada)
Mark P. Andrews, McGill Univ. (Canada)
Salim K. Juma, QPS Technology, Inc. (Canada)
Jacek Chrostowski, National Research Council Canada (Canada)
S. Iraj Najafi, Ecole Polytechnique de Montreal (Canada)

Published in SPIE Proceedings Vol. 2997:
Integrated Optics Devices: Potential for Commercialization
S. Iraj Najafi; Mario Nicola Armenise, Editor(s)

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