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Proceedings Paper

Novel sol-gel fabrication of integrated optical waveguides
Author(s): M. Amir Fardad; Mark P. Andrews; S. Iraj Najafi
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Paper Abstract

The sol-gel method is employed to implement a new, simple and highly versatile fabrication process for integrated optical waveguides on silicon. Photosensitive glass films of several microns thickness are dip-coated and optical components of various configurations through suitable masks are directly inscribed in them by ultraviolet light. Undefined regions are removed by soaking the films in an organic solvent for a few minutes. The developed ridges are then treated and planarized with a cladding layer. Altogether, the procedure is reproducible, and leads to waveguides with low propagation losses, on the order of 0.13 dB/cm.

Paper Details

Date Published: 23 January 1997
PDF: 7 pages
Proc. SPIE 2997, Integrated Optics Devices: Potential for Commercialization, (23 January 1997); doi: 10.1117/12.264134
Show Author Affiliations
M. Amir Fardad, McGill Univ. (Canada)
Mark P. Andrews, McGill Univ. (Canada)
S. Iraj Najafi, Ecole Polytechnique de Montreal (Canada)


Published in SPIE Proceedings Vol. 2997:
Integrated Optics Devices: Potential for Commercialization
S. Iraj Najafi; Mario Nicola Armenise, Editor(s)

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