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Proceedings Paper

Sensitive absorption spectroscopy using tunable semiconductor lasers
Author(s): Edward A. Whittaker; Khosrow Namjou-Khaless; Simin Cai
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Paper Abstract

As performance levels for sophisticated electronic materials and device processing increase so to does the demand for versatile methods for on-line real time sensing of many process parameters. To that end we have developed a series of tunable semiconductor laser spectrometers for use in detection schemes of gas phase chemical species via infrared absorption spectroscopy. We report here on characterization of dual modulation schemes for enhanced sensitivity, interference fringe free, absorption spectroscopy data.

Paper Details

Date Published: 10 January 1997
PDF: 9 pages
Proc. SPIE 3000, Laser Diode and LED Applications III, (10 January 1997); doi: 10.1117/12.263485
Show Author Affiliations
Edward A. Whittaker, Stevens Institute of Technology (United States)
Khosrow Namjou-Khaless, Stevens Institute of Technology (United States)
Simin Cai, Stevens Institute of Technology (United States)


Published in SPIE Proceedings Vol. 3000:
Laser Diode and LED Applications III
Kurt J. Linden, Editor(s)

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