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Proceedings Paper

Architecture for distributed design and fabrication
Author(s): Michael B. McIlrath; Duane S. Boning; Donald E. Troxel
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Paper Abstract

We describe a flexible, distributed system architecture capable of supporting collaborative design and fabrication of semi-conductor devices and integrated circuits. Such capabilities are of particular importance in the development of new technologies, where both equipment and expertise are limited. Distributed fabrication enables direct, remote, physical experimentation in the development of leading edge technology, where the necessary manufacturing resources are new, expensive, and scarce. Computational resources, software, processing equipment, and people may all be widely distributed; their effective integration is essential in order to achieve the realization of new technologies for specific product requirements. Our architecture leverages is essential in order to achieve the realization of new technologies for specific product requirements. Our architecture leverages current vendor and consortia developments to define software interfaces and infrastructure based on existing and merging networking, CIM, and CAD standards. Process engineers and product designers access processing and simulation results through a common interface and collaborate across the distributed manufacturing environment.

Paper Details

Date Published: 21 January 1997
PDF: 14 pages
Proc. SPIE 2913, Plug and Play Software for Agile Manufacturing, (21 January 1997); doi: 10.1117/12.263462
Show Author Affiliations
Michael B. McIlrath, Massachusetts Institute of Technology (United States)
Duane S. Boning, Massachusetts Institute of Technology (United States)
Donald E. Troxel, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 2913:
Plug and Play Software for Agile Manufacturing
Barbara L. Maia Goldstein, Editor(s)

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