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Proceedings Paper

Three-dimensional profile measurement of fine objects by phase-shifting shadow moire interferometry
Author(s): Seung-Woo Kim; Yi-Bae Choi; Jung-Taek Oh
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Paper Abstract

An industrial application of phase-shifting shadow moire interferometry for automatic 3D inspection of fine objects is presented. A line grating is used to generate shadow type moire fringes whose relative phases are readily determined by implementing the principle of phase shifting so that the surface height of the object can be measured. A special phase-measuring algorithm, named the A-bucket algorithm, is used which can precisely computes the relative phases even though there exists a significant level of errors in phase shifting due to miscalibration and external vibration. Finally, several experimental cases are discussed to demonstrate that a measuring accuracy in the order of 0.001 mm can practically be achieved.

Paper Details

Date Published: 20 January 1997
PDF: 9 pages
Proc. SPIE 2909, Three-Dimensional Imaging and Laser-Based Systems for Metrology and Inspection II, (20 January 1997); doi: 10.1117/12.263330
Show Author Affiliations
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (South Korea)
Yi-Bae Choi, Korea Advanced Institute of Science and Technology (South Korea)
Jung-Taek Oh, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 2909:
Three-Dimensional Imaging and Laser-Based Systems for Metrology and Inspection II
Kevin G. Harding; Donald J. Svetkoff, Editor(s)

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