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Proceedings Paper

Making a photoresist relief hologram with expection groove depth
Author(s): Liyun Zhong; Wenbi Zhang; Bingheng Xiong; Qiming Yang; Aibing Gong
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Paper Abstract

The holographic information transferred from photoresist master to replica is the relief groove depth. Many properties of the replica are related to groove depth of master, so to control the groove depth of photoresist master is important. In this paper, a novel method is adopted to obtain the value of the phase modulation by measuring diffraction light intensity of the photoresist master, since there is a certain relationship between groove depth and phase modulation, so the groove depth can be obtained indirectly.

Paper Details

Date Published: 31 December 1996
PDF: 5 pages
Proc. SPIE 2866, International Conference on Holography and Optical Information Processing (ICHOIP '96), (31 December 1996); doi: 10.1117/12.263101
Show Author Affiliations
Liyun Zhong, Yunnan Polytechnic Univ. (China)
Wenbi Zhang, Yunnan Polytechnic Univ. (China)
Bingheng Xiong, Yunnan Polytechnic Univ. (China)
Qiming Yang, Yunnan Polytechnic Univ. (China)
Aibing Gong, Yunnan Polytechnic Univ. (China)

Published in SPIE Proceedings Vol. 2866:
International Conference on Holography and Optical Information Processing (ICHOIP '96)
Guoguang Mu; Guofan Jin; Glenn T. Sincerbox, Editor(s)

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