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Proceedings Paper

Oxygen and nitrogen effects on the electronic properties of RF-sputtered a-SiGe alloys
Author(s): Jorge M. T. Pereira
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Paper Details

Date Published: 1 November 1990
PDF: 10 pages
Proc. SPIE 1405, 5th Congress of the Brazilian Society of Microelectronics, (1 November 1990); doi: 10.1117/12.26301
Show Author Affiliations
Jorge M. T. Pereira, IST (Portugal)


Published in SPIE Proceedings Vol. 1405:
5th Congress of the Brazilian Society of Microelectronics

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