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Proceedings Paper

Versatile ion implanter for submicron and 3-D device engineering
Author(s): Jerald P. Dykstra; Andy M. Ray; Robert Simonton
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Paper Details

Date Published: 1 November 1990
PDF: 10 pages
Proc. SPIE 1405, 5th Congress of the Brazilian Society of Microelectronics, (1 November 1990); doi: 10.1117/12.26300
Show Author Affiliations
Jerald P. Dykstra, Eaton Corp. (United States)
Andy M. Ray, Eaton Corp. (United States)
Robert Simonton, Eaton Corp. (United States)


Published in SPIE Proceedings Vol. 1405:
5th Congress of the Brazilian Society of Microelectronics

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