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Proceedings Paper

Internet remote microscope
Author(s): James Kao; Donald E. Troxel; Somsak Kittipiyakul
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Paper Abstract

The MIT remote microscope is a telemicroscopy system that allows users to remotely control and view a microscope over the internet with a graphical interface that runs on an ordinary workstation computer. The microscope server consists of an automated Zeiss microscope that is controlled by a personal computer, while the client interface is implemented with custom software developed at MIT. The system was designed primarily to provide remote inspection capabilities for semiconductor researchers during the remote fabrication of integrated circuits, but can also be used as a general purpose instrument for remote inspections. The remote microscope also allows any number of clients to simultaneously view the microscope in a conference inspection mode, enabling collaboration opportunities among distant viewers. Because clients require no special hardware, the internet remote microscope is extremely accessible and easy to use, yet provides powerful remote inspection capabilities, collaboration opportunities, and easy access to hard to reach locations such as clean room environments for semiconductor processing.

Paper Details

Date Published: 17 December 1996
PDF: 11 pages
Proc. SPIE 2901, Telemanipulator and Telepresence Technologies III, (17 December 1996); doi: 10.1117/12.262999
Show Author Affiliations
James Kao, Massachusetts Institute of Technology (United States)
Donald E. Troxel, Massachusetts Institute of Technology (United States)
Somsak Kittipiyakul, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 2901:
Telemanipulator and Telepresence Technologies III
Matthew R. Stein, Editor(s)

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