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Proceedings Paper

Ion implantation in Gallium Arsenide MESFET technology
Author(s): Joel Pereira de Souza; Devindra K. Sadana
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Paper Details

Date Published: 1 November 1990
PDF: 15 pages
Proc. SPIE 1405, 5th Congress of the Brazilian Society of Microelectronics, (1 November 1990); doi: 10.1117/12.26299
Show Author Affiliations
Joel Pereira de Souza, Univ. Federal do Rio Grande do Sul (Brazil)
Devindra K. Sadana, IBM/Thomas J. Watson Research (United States)

Published in SPIE Proceedings Vol. 1405:
5th Congress of the Brazilian Society of Microelectronics

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