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Proceedings Paper

Technology and design of SIPOS films used as field plates for high-voltage planar devices
Author(s): D. Jaume; G. Charitat; A. Peyre-Lavigne; P. Rossel
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Paper Details

Date Published: 1 November 1990
PDF: 5 pages
Proc. SPIE 1405, 5th Congress of the Brazilian Society of Microelectronics, (1 November 1990); doi: 10.1117/12.26298
Show Author Affiliations
D. Jaume, Motorola Semiconducteurs SA (France)
G. Charitat, Lab. d'Automatique et d'Analyse des Systemes (France)
A. Peyre-Lavigne, Motorola Semiconducteurs SA (France)
P. Rossel, Lab. d'Automatique et d'Analyse des Systemes (France)


Published in SPIE Proceedings Vol. 1405:
5th Congress of the Brazilian Society of Microelectronics

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