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Proceedings Paper

Light diffraction and new laser technologies for maskless formation of submicron relief structures
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Paper Abstract

The review of theoretical and experimental investigations on maskless formation of submicron periodic relief gratings on the surface of AIIIBV semiconductor materials, carried out in the Scientific Research Center for Technological Lasers of Russian Academy of Sciences is presented. The lecture is based on the materials, which were presented in the original papers. The revue of the literature can be found in the above references.

Paper Details

Date Published: 27 December 1996
PDF: 13 pages
Proc. SPIE 3052, Ninth International School on Quantum Electronics: Lasers--Physics and Applications, (27 December 1996); doi: 10.1117/12.262969
Show Author Affiliations
Vladislav Ya. Panchenko, Scientific Research Ctr. for Laser Technology (Russia)


Published in SPIE Proceedings Vol. 3052:
Ninth International School on Quantum Electronics: Lasers--Physics and Applications
Peter A. Atanasov, Editor(s)

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