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Proceedings Paper

Soft-defect inspection equipment based on DIC technique
Author(s): Tsuneyuki Hagiwara
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Paper Abstract

We have recently presented an operational principle based on the differential interference contrast (DIC) technique that we call `A-DIC method.' This method can suppress the circuit pattern images, and enhance the contrast between the images of the contamination and the defect-less circuit patterns. It uses both the transmission and reflection images. In this paper, we describe the other simpler method that we call `B- DIC' method.' This method requires only the reflection images and can be built in a confocal scanning microscope.

Paper Details

Date Published: 27 December 1996
PDF: 11 pages
Proc. SPIE 2884, 16th Annual BACUS Symposium on Photomask Technology and Management, (27 December 1996); doi: 10.1117/12.262837
Show Author Affiliations
Tsuneyuki Hagiwara, Nikon Corp. (Japan)


Published in SPIE Proceedings Vol. 2884:
16th Annual BACUS Symposium on Photomask Technology and Management
Gilbert V. Shelden; James A. Reynolds, Editor(s)

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