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Proceedings Paper

Digital interface to photomask vendors
Author(s): Jane L. Wachinski; William R. Tennis
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Paper Abstract

Lucent Technologies (formerly AT&T) Microelectronics completed transition of their mask manufacturing to external vendors 1Q96. Maintaining a digital interface of all mask data and ordering information was critical to optimize the front end handshake with our vendors and to provide continuing support to our wafer fabrication lines. The goals that were set and achieved by using a totally digital interface are: reduced critical path vendor customer service and front end time; clarification and accuracy in meeting requirements; and ISO 9002 compliance, traceability and repeatability.

Paper Details

Date Published: 27 December 1996
PDF: 10 pages
Proc. SPIE 2884, 16th Annual BACUS Symposium on Photomask Technology and Management, (27 December 1996); doi: 10.1117/12.262836
Show Author Affiliations
Jane L. Wachinski, Lucent Technologies (United States)
William R. Tennis, Lucent Technologies (United States)


Published in SPIE Proceedings Vol. 2884:
16th Annual BACUS Symposium on Photomask Technology and Management
Gilbert V. Shelden; James A. Reynolds, Editor(s)

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