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Proceedings Paper

Laser lithography technique to fabricate integrated optical elements by ion exchange in glass
Author(s): Vincente Moreno de las Cuevas; Jose Ramon Salgueiro; Carlos Montero; Xesus Prieto; Jesus Linares
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Paper Abstract

A simple, effective and low cost laser writing lithographic system is presented. This system with a simple optical design and interferometric control of the alignment is able to produce smallest optical features as 1 micrometers wide with high quality edges to produce prototypes of integrated optical elements by ion exchange in research laboratories. Results of several kinds of mask that can be generated for this systems as well as some of the integrated elements produced are shown.

Paper Details

Date Published: 20 December 1996
PDF: 6 pages
Proc. SPIE 2954, Fiber Integrated Optics, (20 December 1996); doi: 10.1117/12.262433
Show Author Affiliations
Vincente Moreno de las Cuevas, Univ. de Santiago de Compostela (Spain)
Jose Ramon Salgueiro, Univ. de Santiago de Compostela (Spain)
Carlos Montero, Univ. de Santiago de Compostela (Spain)
Xesus Prieto, Univ. de Santiago de Compostela (Spain)
Jesus Linares, Univ. de Santiago de Compostela (Spain)


Published in SPIE Proceedings Vol. 2954:
Fiber Integrated Optics
Giancarlo C. Righini, Editor(s)

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