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Proceedings Paper

Absolute interferometric testing of spherical surfaces
Author(s): Bruce E. Truax
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Paper Abstract

In typical interferometric testing the part under test is measured against a reference standard. The measured result is the difference between the errors in the test and reference surfaces plus any addition errors introduced by the interferometer. For accurate qualification of the reference surface it is necessary to employ a technique that can measure the part absolutely. This paper examines an existing technique for absolute testing of spherical surfaces which produces a map of the entire surface. The capabilities of this technique, error sources, and experimental data will be examined.

Paper Details

Date Published: 1 March 1991
PDF: 8 pages
Proc. SPIE 1400, Optical Fabrication and Testing, (1 March 1991); doi: 10.1117/12.26111
Show Author Affiliations
Bruce E. Truax, Zygo Corp. (United States)


Published in SPIE Proceedings Vol. 1400:
Optical Fabrication and Testing

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