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Proceedings Paper

Interferometer accuracy and precision
Author(s): Lars A. Selberg
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Paper Abstract

Several optical errors present in interferometer systems are examined in detail. Optical cavity errors are typically the primary limitation on measurement accuracy. Secondary sources of error include imaging distortion and ray-mapping (slope) errors. The effect of phase modulation/processing errors on precision is briefly discussed. Some on- site errors (operator technique and environmental effects) are also examined. Rules of thumb for error estimation are presented when applicable. Specific quantitative analysis is based on the Zygo MARK IVxp phase measuring interferometer.

Paper Details

Date Published: 1 March 1991
PDF: 9 pages
Proc. SPIE 1400, Optical Fabrication and Testing, (1 March 1991); doi: 10.1117/12.26110
Show Author Affiliations
Lars A. Selberg, Zygo Corp. (United States)


Published in SPIE Proceedings Vol. 1400:
Optical Fabrication and Testing

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