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Proceedings Paper

Microassembly of a piezoelectric miniature motor
Author(s): Mats Bexell; Stefan A. I. Johansson
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Paper Abstract

Presented is an assembling method for the fabrication of a piezoelectric miniature motor. The fabrication is done by placement and soldering of actuator elements to a substrate. The assembly of the miniature motor demands high precision (plus or minus 1 micrometer), four-axes positioning which is fulfilled by a special micropositioning stage. A particular assembling sequence is used and critical process and performance parameters are evaluated. One of the important factors is the joint strength between actuator element and substrate. A joint strength as high as 100 MPa has been measured which would allow for torque values in the range of 15 mNm for a 4 mm diameter motor.

Paper Details

Date Published: 11 December 1996
PDF: 11 pages
Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); doi: 10.1117/12.260619
Show Author Affiliations
Mats Bexell, Uppsala Univ. (Sweden)
Stefan A. I. Johansson, Uppsala Univ. (Sweden)


Published in SPIE Proceedings Vol. 2906:
Microrobotics: Components and Applications
Armin Sulzmann, Editor(s)

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