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Proceedings Paper

High-average power XeCl laser with surface corona-discharge preionization
Author(s): Haruhiko Nagai; Kenyu Haruta; Yukio Sato; Masao Inoue; Akihiro Suzuki
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Paper Abstract

A new combination of a surface corona-discharge preionization (SCP) electrode with a spiker-sustainer circuit is investigated for the development of a high-average power XeCl excimer laser with high repetition rate. The investigation for single shot operation proves the potentialities of the combination scheme. The result of repetitive operation demonstrates the promising prospect as an excitation scheme of industrial high-power excimer 1aser.

Paper Details

Date Published: 1 February 1991
PDF: 6 pages
Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); doi: 10.1117/12.26024
Show Author Affiliations
Haruhiko Nagai, Mitsubishi Electric Corp. (Japan)
Kenyu Haruta, Mitsubishi Electric Corp. (Japan)
Yukio Sato, Mitsubishi Electric Corp. (Japan)
Masao Inoue, Mitsubishi Electric Corp. (Japan)
Akihiro Suzuki, Mitsubishi Electric Corp. (Japan)


Published in SPIE Proceedings Vol. 1397:
8th Intl Symp on Gas Flow and Chemical Lasers

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