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Proceedings Paper

Influence of fabrication precision on laser beam forming by fabricated optics
Author(s): Koshichi Nemoto; Takashi Fujii; Naohiko Goto; Hideo Takino; Teruki Kobayashi; Norio Shibata; Kazuya Yamamura; Yuzo Mori
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Paper Abstract

The profile of a laser beam was transformed into a rectangular uniform profile using a fabricated mirror. However, intensity ripples in the transformed beam were observed. These intensity ripples resulted from small ripples on the fabricated mirror surface. The peak-to-valley height and the peak-to-peak distance of the ripples on the mirror surface due to the fabrication error are 1.2 mm and about 10 nm, respectively. We evaluated the effect of these small ripples on the transformed intensity profile by calculating the laser beam propagation characteristics. The calculated laser beam profile was similar to the actual beam profile, and exhibited intensity ripples. Therefore, the intensity ripples of the reshaped beam resulted from the small ripples on the fabricated surface with the peak-to- valley height of 1/60 lambda. These ripples on the fabricated surface were probably caused by the feed speed error of the x-y stage of the fabrication machine.

Paper Details

Date Published: 20 November 1996
PDF: 7 pages
Proc. SPIE 2870, Third International Workshop on Laser Beam and Optics Characterization, (20 November 1996); doi: 10.1117/12.259944
Show Author Affiliations
Koshichi Nemoto, Komae Research Lab./Research Institute of Electric Power Industry (Japan)
Takashi Fujii, Komae Research Lab./Research Institute of Electric Power Industry (Japan)
Naohiko Goto, Komae Research Lab./Research Institute of Electric Power Industry (Japan)
Hideo Takino, Nikon Corp. (Japan)
Teruki Kobayashi, Nikon Corp. (Japan)
Norio Shibata, Nikon Corp. (Japan)
Kazuya Yamamura, Osaka Univ. (Japan)
Yuzo Mori, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 2870:
Third International Workshop on Laser Beam and Optics Characterization
Michel Morin; Adolf Giesen, Editor(s)

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