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Proceedings Paper

Measurement and evaluation methods for beam characterization of commercial excimer lasers
Author(s): Hans Stephen Albrecht; Ulrich Rebhan; Klaus R. Mann; J. Ohlenbusch
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Paper Abstract

This paper describes the specific requirements for measurement of excimer laser beam profiles for standardized characterization 'of commercial excimer lasers. A corresponding measurement system is presented which allows a simultaneous characterization of energy density distribution in the near field as well as in the focal plane of a lens (far field). Specially adapted UV-cameras make possible sings pulse diagnostic. Beam widths are calculated from the digitized camera data by different methods corresponding to the proposals of ISO 11146 (second moment, moving knife edge, and moving slit) and the results are compared. In particular, the influence of background signals as well as the typical shape of energy density distribution in the near field to the determined beam widths are analyzed.

Paper Details

Date Published: 20 November 1996
PDF: 6 pages
Proc. SPIE 2870, Third International Workshop on Laser Beam and Optics Characterization, (20 November 1996); doi: 10.1117/12.259918
Show Author Affiliations
Hans Stephen Albrecht, Lambda Physik GmbH (Germany)
Ulrich Rebhan, Lambda Physik GmbH (Germany)
Klaus R. Mann, Laser-Lab. Goettingen eV (Germany)
J. Ohlenbusch, Laser-Lab. Goettingen eV (Germany)


Published in SPIE Proceedings Vol. 2870:
Third International Workshop on Laser Beam and Optics Characterization
Michel Morin; Adolf Giesen, Editor(s)

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